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Joint research validates new semiconductor etching process, achieving five times speed improvement

A collaborative research team from Nagoya University and Tokyo Electron Miyagi Ltd. has demonstrated that the company's new ...
AZOM

Bosch Process for Etching Micro-Mechanical Systems (MEMS)

The fundamentals of a good Bosch etching system are described below; There are a number of significant features of the equipment used for Bosch processing which differ from normal ICP systems: In ...
EDN

Voltage controls etching process

With photolithography not able to produce circuit lines much thinner than 100nm, a major focus of research into nanotechnology is in developing means to construct circuits that break the 100nm barrier ...
AZOM

From Trial-and-Error to Precision: EP-Replayer’s Role in Etch Process Optimization

AZoMaterials interviews Matt Wilding about how the EP-Replayer enables users to simulate previous etch runs in real time, helping them optimize End Point detection methods, and more. Can you start by ...