High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
Abstract: In this paper, air-coupled piezoelectric micromachined ultrasonic transducers (PMUTs) using 36% scandiumdoped aluminum nitride (ScAlN) thin-film are presented. ScAlN is known to exhibit ...
Abstract: Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of ...
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