Abstract: For deep learning-based soft sensors, the lack of interpretability and the consequent unreliability has become one of the most important problems. In this article, a neural network scheme ...
Laboratory for Sensors, IMTEK − Department of Microsystems Engineering, University of Freiburg, 79110 Freiburg, Germany Laboratory for Electrical Instrumentation and Embedded Systems, IMTEK − ...
Abstract: In this study, we fabricated a limiting current-type microelectromechanical system (MEMS) sensor and evaluated its sensing performance of oxygen and humidity concentration. The MEMS oxygen ...
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