Abstract: This paper reports a novel DRIE compensation mask pattern for fabricating an extremely thick sense-comb structure. When we attempted to fabricate a 300-μm-thick sense-comb structure to ...
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references = 'Pauli, Wolfgang M., Amanda N. Nili, and J. Michael Tyszka. 2018. ?A High-Resolution Probabilistic in Vivo Atlas of Human Subcortical Brain Nuclei ...
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