Abstract: In this study, we fabricated a limiting current-type microelectromechanical system (MEMS) sensor and evaluated its sensing performance of oxygen and humidity concentration. The MEMS oxygen ...

Researchers at the Department of Energy's Oak Ridge National Laboratory are helping to pave a path for the eventual discovery of dark matter. With new approaches to measurement in the quantum realm, ...

Abstract: Bulk yttria-stabilized zirconia (YSZ) oxygen detectors are widely used in areas such as the automotive industry. However, these detectors have high power consumption, which limits their ...